Solution 4: High‑end sub‑micron low‑voltage servo – Core optical imaging & diagnostics
• Matched products
60ASM400‑5‑17BCH (48 V, 400 W, rated 1.27 N·m, peak 2.54 N·m, 17‑bit encoder) + MCAC610‑23B‑EC (EtherCAT low‑voltage drive, 10 A, built‑in EMC filter)
• Applicable equipment
Fully automated optical imaging (wafer inspection microscope Z‑axis/XY scan), precision medical diagnostic instruments (digital pathology scanners), multi‑axis optical inspection platforms, high‑end medical precision scanning equipment
• Technical features
Optimised torque ripple (<1% rated), system vibration reduced to <0.005 m/s² (with precision guides);
Built‑in EMC filter (meets EMI Class A) with shielded wiring and proper grounding greatly reduces EMI (conducted emission below 30 MHz limit);
Combined with 17‑bit encoder and precision transmission (ballscrew C3 or higher) for sub‑micron positioning (±0.1–1 μm);
Only minor slow accuracy drift over long operation (<0.3 μm/24 h), recoverable by regular calibration;
Noise <38 dB, ISO Class 5 cleanliness;
Bus‑based multi‑axis coordinated motion for complex scanning paths (jitter <1 μs);
Selection constraint: For load >5 kg or higher thrust, upgrade to 750 W (80ASM750‑5‑17BCH, 2.38 N·m).
• Selection boundary
Core axes for wafer‑level imaging, micro‑diagnostics, and precision scanning must use this solution; auxiliary trimming may use Solution 1 or 2.